Cost effective filtration for non-outgassing chemistries at moderate temperatures in applications where metal control is not critical

Point-of-tool, general use filter with high flow rate and good contaminant retention performance

Point-of-tool, DI water filter with high flow-rate-performance and good contaminant retention capabilities in greater than 180 nm technology nodes

Point of tool and point-of-dispense solvent, DI water and dilute acid/base filter with good contaminant retention performance

For consistent filtration quality and performance, these filters offer scalability as your volume and filtration needs change.